With the rapid development and application of nanotechnology is becoming more widespread, micromachines, MEMS technology and the corresponding precision micromachining, micro-parts and micro-mechanical precision manufacturing technology has gained rapid development. In order to produce miniature parts and micro-mechanical, micro-mechanical processing of rapid development, has now reached a high level. EDM subtle, subtle ultrasonic vibration machining, subtle excimer laser machining, plastic molding and other subtle are used for machining accuracy of micron-scale micro-mechanical components. In addition, the development of a number of specific new technology, such as stereo lithography, LIGA technology, the sacrificial layer processes. And it has developed a micro-mechanical and micro-technology automatic assembly machinery factories and the like. The following is an overview of the latest developments of precision micro-machining technology.