Atomic force microscope (AFM) probe tip is generally used hard materials (e.g., diamond or Si3N4 material), the probe tip can be used directly on the surface of the specimen scribing, so that the tip shape according to the size requirements of the microstructure scan through accurate control of the tip of force to control the scoring depth, you can get the exact shape structure with tiny graphics requirements. AFM can also be accurate on-line measurement in order to ensure the accuracy of scribing the workpiece.