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加工陶瓷和半导体材料的新型激光金刚石刀具

发布时间:2013-08-08

  美国西密歇根大学的制造工程学教授John Patten博士开发了一种称为“μ-LAM”的微激光辅助加工技术,该方法将激光与金刚石刀具结合起来,对硅半导体和陶瓷材料进行加热软化和切削加工。

  John Patten介绍说,“这些材料通常都非常脆,如果试图使它们变形或对其进行加工,它们往往很容易破碎。通过使这些材料软化,我们就能增大其柔性,使其更易于加工。”

  μ-LAM加工装置集成了一种红外光纤激光(波长范围1000-1500nm)。激光束通过一个具有很高光学清晰度的单点金刚石刀具照射到工件上,将工件材料加热到600℃以上。刀尖圆弧半径为5μm-5mm的金刚石刀具通过环氧树脂粘接(适用于毫瓦级激光功率的加工)或焊接/钎焊(适用于1瓦或更大激光功率的加工)的方式,连接到装在一个钨或硬质合金壳体中的激光器上。

  其他工程技术人员已经尝试了用各种不同的方法来加工脆性材料(如陶瓷)。其中一种方法是先在炉子中加热工件,然后再对其进行加工;另一种方法是分别采用激光加热和金刚石刀具切削。而Patten发明的方法将激光和金刚石刀具集成到一起,因此具有明显优势。他解释说,“事情变得更简单,因为激光与刀具本身就是对准的,激光加热的部位正好就在刀具切削刃处,因此能获得最好的加工效果。此外,工件材料也不会过度加热。”

  Patten说,μ-LAM加工技术还可以削减加工时间和加工成本,并获得非常光滑的光学表面。“采用常规加工方法时,如果想要制造一个光学元件(如反射镜),通常需要从浇铸工件毛坯开始,然后进行一系列加工步骤:粗磨、精磨、研磨,才能最终成形。而我们的加工方法取代了原来的一系列工序,在CNC数控机床上用单点金刚石刀具进行切削,并且也能获得极好的表面粗糙度(Ra1-10nm)。”

  Patten正与一家日本公司合作,争取实现μ-LAM系统的商业化应用。他预期,这项发明将在一些行业(包括汽车、航空、医疗设备、半导体和光学行业)找到用武之地。他表示,“我们最初的目标是瞄准光学和半导体行业,但现在看来,可能其大部分应用将在高能、高温微电子设备上。在半导体行业中,硅片是芯片和集成电路的载体,在温度较高的工作条件下,人们就会使用碳化硅。因此,现在我们的全部精力几乎都集中在碳化硅的加工上。”



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